LASER-INDUCED SURFACE ACOUSTIC WAVES FOR THIN FILM CHARACTERIZATION

Authors

  • Radim Kudělka Joint Laboratory of Optics, Palacky University Olomouc, 17. Listopadu 50a, 772 07, Olomouc, Czech Republic
  • Lukáš Václavek Joint Laboratory of Optics, Palacky University Olomouc, 17. Listopadu 50a, 772 07, Olomouc, Czech Republic
  • Jan Tomáštík Institute of Physics of the Czech Academy of Sciences, Joint Laboratory of Optics of Palacky University and Institute of Physics AS CR, 17. Listopadu 12, CZ-771 46, Olomouc, Czech Republic
  • Sabina Malecová Joint Laboratory of Optics, Palacky University Olomouc, 17. Listopadu 50a, 772 07, Olomouc, Czech Republic
  • Radim Čtvrtlík Regional Centre of Advanced Technologies and Materials, Joint Laboratory of Optics of Palacky University and Institute of Physics of the Czech Academy of Sciences, Faculty of Science, Palacky University, 17. Listopadu 12, 77146 Olomouc, Czech Republic

DOI:

https://doi.org/10.14311/APP.2020.27.0057

Keywords:

Anisotropy, laser-induced surface acoustic waves, nanoindentation, thin films, Young’s modulus

Abstract

Knowledge of mechanical properties of thin films is essential for most of their applications. However, their determination can be problematic for very thin films. LAW (Laser-induced acoustic waves) is a combined acousto-optic method capable of measuring films with thickness from few nanometers. It utilizes ultrasound surface waves which are excited via short laser pulses and detected by a PVDF foil. Properties such as Young’s modulus, Poisson’s ratio and density of both the film and the substrate as well as film thickness can be explored.Results from the LAW method are successfully compared with nanoindentation for Young’s modulus evaluation and with optical method for film thickness evaluation and also with literature data. Application of LAW for anisotropy mapping of materials with cubic crystallographic lattice is also demonstrated.

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Published

2020-06-11

Issue

Vol. 27 (2020): Proceedings of the 14th International Conference on Local Mechanical Properties - LMP 2019

Section

Articles

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