MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION

Authors

  • Dmitriy Tsyrenov Institute of Physical Materials Science SB RAS
  • Aleksandr Semenov Institute of Physical Materials Science SB RAS, Laboratory of Physical Materials Science, Sakhyanovoy St. 6,670047 Ulan-Ude, Russia.
  • Natalia Smirnyagina Institute of Physical Materials Science SB RAS, Laboratory of Physical Materials Science, Sakhyanovoy St. 6,670047 Ulan-Ude, Russia.

DOI:

https://doi.org/10.14311/AP.2015.55.0136

Abstract

A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological parameters for layer deposition in the conditions of coordinated action of the vacuum arc evaporator and the planar magnetron have been studied. This report describes the phase composition of TiN-Cu layers and the structure on fused silica substrates.

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Published

2015-04-30

Issue

Vol. 55 No. 2 (2015)

Section

Articles

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How to Cite

Tsyrenov, D., Semenov, A., & Smirnyagina, N. (2015). MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION. Acta Polytechnica, 55(2), 136-139. https://doi.org/10.14311/AP.2015.55.0136