MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION

Authors

  • Alena Olegovna Borduleva National Research Tomsk Polytechnic University Department of Experimental Physics
  • Galina Alekseevna Bleykher National Research Tomsk Polytechnic University Department of Experimental Physics
  • Dmitrii Vladimirovich Sidelev National Research Tomsk Polytechnic University Department of Experimental Physics
  • Valeriy Pavlovich Krivobokov National Research Tomsk Polytechnic University Department of Experimental Physics

DOI:

https://doi.org/10.14311/AP.2016.56.0425

Keywords:

magnetron sputtering, hot target, evaporation, high rate deposition.

Abstract

This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal insulation target types from the magnetron body. It was found that the presence of an evaporation component allows the rate of removal of atoms from the surface of a solid target to be increased with limited thermal conduction. A mathematical simulation was used to evaluate the contribution of evaporation to the increase in the coating deposition rate for complete and partial thermal insulation. It was found that non-uniformity of the direct-axis component of the magnetic induction vector helps to localize the heating. also increases the evaporation rate on the surface of the target. It was proved that local evaporation including sublimations on the surface of a hot target is a significant factor in increasing the coating deposition rate. Due to this mechanism, the coating deposition rate can be increased 5 times for Ti in comparison with fully cooled targets. This result can be applied for direct current magnetrons and also for pulsed systems. It was also found that evaporation increased the energy efficiency of the target erosion. The most suitable metals were selected for obtaining high-intensity emission of atoms from a solid target.

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Author Biographies

  • Alena Olegovna Borduleva, National Research Tomsk Polytechnic University Department of Experimental Physics

    Alena Borduleva is a PhD student of Experimental physics department at Tomsk Polytechnic University. She received her master's degree in Technical physics from Tomsk Polytechnic University. Her recent publications include "Solid oxide fuel cell with Ni-Al support" (International Journal of Hydrogen Energy, 2015) and "Application of PVD methods to solid oxide fuel cells" (Applied Surface Science, 2014). Her research interests include:

    • development of theoretical bases of material processing technologies using low-temperature plasma;
    • transfer of energy and matter in the magnetron sputtering systems at high rate deposition of coatings.
  • Galina Alekseevna Bleykher, National Research Tomsk Polytechnic University Department of Experimental Physics

    Galina Bleykher is a Professor of Experimental physics department at Tomsk Polytechnic University (Russia). She received her doctorate in Physical and Mathematical Sciences from Tomsk Polytechnic University. Her recent publications include "Energy and substance transfer in magnetron sputtering systems with liquid-phase target" (Vacuum, 2016), "Magnetron deposition of coatings with evaporation of the target" (Technical Physics, 2015) and "Thermal processes and emission of atoms from the liquid phase target surface of magnetron sputtering system" (Russian Physics Journal, 2015). Her research interests include:

    • mathematical modeling of energy and matter transfer under the action of powerful beams of charged particles and plasma on the solids;
    • the erosion of solids surface under the effect of concentrated energy flows;
    • development of theoretical bases of material processing technologies using low-temperature plasma and charged particle beams;
    • transfer of energy and matter in the magnetron sputtering systems at high rate deposition of coatings.
  • Dmitrii Vladimirovich Sidelev, National Research Tomsk Polytechnic University Department of Experimental Physics
    Dmitrii Sidelev is a PhD student of Experimental physics department at Tomsk Polytechnic University (Russia). He received his master's degree in Technical physics from Tomsk Polytechnic University. His recent publications include "Antifriction coatings based on a-C for biomedicine applications" (Journal of Physics: Conference Series, 2016) and "The reactive deposition of TiOx thin films" (Advanced Materials Research, 2014). His research interests include the deposition of thin films in magnetron discharge plasma.
  • Valeriy Pavlovich Krivobokov, National Research Tomsk Polytechnic University Department of Experimental Physics

    Valeriy Krivobokov is a Professor of Experimental physics department at Tomsk Polytechnic University (Russia). He received his doctorate in Physical and Mathematical Sciences from the Moscow Engineering Physics Institute. His recent publications include "Energy and substance transfer in magnetron sputtering systems with liquid-phase target" (Vacuum, 2016), "Finish ion beam treatment of the longrange cylindrical products outer surface in automatic mode" (IOP Conference Series: Materials Science and Engineering, 2015) and "Thermal processes and emission of atoms from the liquid phase target surface of magnetron sputtering system" (Russian Physics Journal, 2015). The main research directions are to study interaction of charged particle beams with a solid-state material, energy dissipation of radiation fields and transfer of atoms, stimulated radiation.

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Published

2016-12-31

Issue

Vol. 56 No. 6 (2016)

Section

Articles

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How to Cite

Borduleva, A. O., Bleykher, G. A., Sidelev, D. V., & Krivobokov, V. P. (2016). MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION. Acta Polytechnica, 56(6), 425-431. https://doi.org/10.14311/AP.2016.56.0425