BORDULEVA, Alena Olegovna; BLEYKHER, Galina Alekseevna; SIDELEV, Dmitrii Vladimirovich; KRIVOBOKOV, Valeriy Pavlovich. MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION. Acta Polytechnica, [S. l.], v. 56, n. 6, p. 425–431, 2016. DOI: 10.14311/AP.2016.56.0425. Disponível em: https://ojst.is.cvut.cz/ojs/index.php/ap/article/view/3766.. Acesso em: 27 jun. 2025.