Borduleva AO, Bleykher GA, Sidelev DV, Krivobokov VP. MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION. Acta Polytech [Internet]. 2016 Dec. 31 [cited 2025 Jun. 27];56(6):425-31. Available from: https://ojst.is.cvut.cz/ojs/index.php/ap/article/view/3766